Large-size free-standing single-crystal ?-Ga<sub>2</sub>O<sub>3</sub> membranes fabricated by hydrogen implantation and lift-off
نویسندگان
چکیده
This paper reports the first successful demonstration of large-size free-standing single-crystal ?-Ga2O3 NMs fabricated by hydrogen implantation and lift-off process directly from MOCVD grown epifilms on native substrates.
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ژورنال
عنوان ژورنال: Journal of Materials Chemistry C
سال: 2021
ISSN: ['2050-7526', '2050-7534']
DOI: https://doi.org/10.1039/d1tc00682g